Knowledgeable and practiced in the unique wafer handling demands of LED chip production. Supporting the unique wafer handling demands of LED chip production, Entegris offers an extensive selection of carriers that are made from chemically inert materials to safely move standard and thin wafers inside the fab environments.
Single Wafer Trays
Secures 125 mm wafers in a convenient, easy-to-use package.
Single Wafer Shippers
Our traditional molded PFA process wafer carriers and modular construction PFA process enhancement wafer carriers are designed for wet chemical processing applications in 200 mm fabs.
Front opening unified pod platform with superior microenvironment control that provides clean and secure 300 mm wafer transport.