Verity Instruments is an industry leading manufacturer of optical emission instruments and software applications for endpoint detection, advanced process control, and film thickness measurement.
Verity’s optical emission-based instruments include spectrometers, monochromators and interference filter-based detectors. These products are used for endpoint determination in etch, ion beam etch, CVD etchback, photoresist strip, chemical/mechanical polishing (CMP) and other processes. Verity instrumentation also provides for plasma diagnostics, process development, process control and film thickness measurement.
The development of advanced signal processing algorithms permits Verity to offer solutions for low-exposed area endpoint and other complex signal processing applications. Advanced software applications include proprietary pattern recognition (Neural Network) and multi-wavelength algorithms.