Wafer Carriers

Wafer Carriers

Our traditional molded PFA process wafer carriers and modular construction PFA process enhancement wafer carriers are designed for wet chemical processing applications in 200 mm fabs.

  • The open flow carriers allow solutions to pass through evenly and quickly
  • Constructed of chemical-resistant PFA material enables your process to remain uncontaminated, maintaining chemical integrity

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Wafer Carriers Part Numbers

PART NUMBERS

200mm Process Wafer Carriers Part Numbers

PART NUMBERPRODUCT TYPEWAFER CAPACITYPROFILEEND WALL HANDLE TYPEEND WALL FLANGE TYPESIDE WALLTOP FLANGESROTATED RAILEND WALL CONFIGURATION
A192-80M-0215Process wafer carrier25HighStandard, high positionStandard outboardOpenNoN/ASolid
A192-80MNH-0215Process wafer carrier25HighN/AStandard outboardOpenNoN/ASolid
A192-80MU1-0215Process wafer carrier25HighN/AStandard outboardOpenNoN/A"U" shaped
A192-81M-0215Process wafer carrier25LowN/AStandard outboardOpenNoN/ASolid
A192-81MJ26-HP0215Process wafer carrier26LowStandard, high positionNotched wide outboardOpenNoN/ASolid
A192-82M-0215Process wafer carrier50Low

Technical Specifications

 

MaterialsPFA
Temperature limitsContinuous use (process enhancement)165°C (329°F)
Continuous use (traditional)180°C (356°F)
Wafer insertion290°C (554°F)
Wafer capacityProcess wafer carrier25, 26, or 50
 Process enhancement wafer carrier50

 

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