Perfect your reactive processes with Speedflo, an advanced reactive feedback control system delivering improvements to deposition rates, coating properties and process reliability. Speedflo is designed around the demands of real processes and has been proven on hundreds of different industrial plasma-based deposition machines – each with varying demands.
Perfect your process
With two options available – offering a choice of 8 channels for Speedflo, or 3 channels for Speedflo Mini – Speedflo has the flexibility to benefit a wide range of reactive processes, from magnetron sputtering to PECVD deposition.
Achieving high performance control of your system is a quick and easy process using Speedflo. A patented, state-of-the-art automatic controller tuning procedure provides optimum controller parameters for your process at the click of a button. The auto-tuning procedure is fast and effective – and works within any system or sensor configuration.
After performing an integrated system calibration and identification procedure, the auto-tuner instantly generates the optimum controller parameters for your process by using advanced inverse dynamics algorithms to analyse the collected data.
The whole procedure takes a couple of minutes and is perfectly suited to the demands of actual processes.
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