• Brooks XacTorr Vacuum Capacitance Manometers
  • XacTorr Feature

Brooks XacTorr Vacuum Capacitance Manometers

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.

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  • Available for process ranges from 0.10 Torr to 1000 Torr
  • Multiple accuracy levels available
  • Patented Mark IV sensor
  • Digital architecture enables operation over a wide dynamic range with extremely good accuracy
  • Dual-zone temperature control improves measurement stability and repeatability
  • Multi-decade digital calibration provides superior window of known accuracy
  • Intelli-touch zero adjustment
  • Independent & easily accessible diagnostic service port
  • DeviceNet® and analog communication options



  • Lower drift, superior protection from deposition of process gases
  • Elimination of manual potentiometers and drift associated with electronics
  • Fast warm-up, close temperature control, rapid response to changes
  • Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
  • Cannot be zeroed if pressure is too high or desired temperature not reached
  • Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting



  • Semiconductor fabrication
  • Thin-film deposition processes – glass, web and optical coatings
  • Freeze drying perishable materials
  • High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)


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