SD2048 GH/GL/GM High Performance Spectrometers

The SD2048 GH/GL/GM products are designed for demanding semiconductor process applications. The advantages of the SD2048 GH/GL/GM products include excellent ultraviolet (UV) response (down to 200nm), stability against degradation under UV exposure, high sensitivity, wide dynamic range and superior output linearity. The unique optical platform results in highly efficient imaging of spectral information at the image plane of the two-dimensional detector array.

Note: The SD2048 range is similar to the SD1024 range, however, they use a 2048-element high performance CCD.

The SD2048GH is similar to the SD1024G. However, it uses a 2048-element high performance CCD, the “H” high optical throughput optics, a narrower slit, and reports spectral data in 0.25 nm increments.

Features & Benefits

Provides robust endpoint determination
Can be used with existing SpectraView™ software
Use for endpoint detection, fault detection, and process diagnostics
200 – 800 nm range or 200 – 900 nm range
For demanding high resolution applications
Scientific grade TE cooled CCD
Same optics as SD1024GH

The SD2048GL is nearly identical to the SD1024GL but reports spectral data in 0.25nm increments instead of 0.5nm readings as with the SD1024G and SD1024GL. Compared to the SD1024GL, the SD2048GL features a narrower inlet slit and modified embedded software parameters. Although the SD2048GL has better resolution than the SD1024GL, its sensitivity is significantly less.

Features & Benefits

Provides robust endpoint determination
Can be used with existing SpectraView™ software
Use for endpoint detection, fault detection, and process diagnostics
200 – 800 nm range
For high resolution applications
Bright source emission required
RoHS Compliant

The SD2048GM is nearly identical to the SD1024GM, but reports spectral data in 0.25nm increments instead of 0.5nm readings as with the SD1024GM. Compared to the SD1024GM, the SD2048GM features a narrower inlet slit and modified embedded software parameters. Although the SD2048GM has better resolution than the SD1024GM, its sensitivity is significantly less.

Features & Benefits

Provides robust endpoint determination
Can be used with existing SpectraView™ software
Use for endpoint detection, fault detection, and process diagnostics
200 – 800 nm range or 200 – 900 nm range
For moderately demanding applications
Single or multi-fiber input
Mid-grade not TE cooled CCD
Same optics as SD1024G