A cryopump is an ultra-high vacuum pumping system that removes gases from a vacuum chamber through cryocondensation and cryosorption at very low temperatures.
Cryopumps are widely used in semiconductor and integrated circuit manufacturing, optical coating, solar panel production, flat panel display manufacturing, optoelectronic device production and vacuum electronics. They are also key vacuum components in physical vapour deposition (PVD) and ion implantation systems used for integrated circuit fabrication.
Beyond semiconductor processing, cryopumps support demanding vacuum applications including space simulation, high-energy physics, particle accelerators, vacuum calibration and leak detection.