HZN-x25 P5 Wafer Transfer Machine

The Horizon Junior Series V will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette. As with all Mactronix wafer transfer systems, the Horizon Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers. PLC controlled enhancing the transfer machine’s simplicity. With the push of a button, the machine transfers wafers safely and automatically.

The Horizon Series V machines are designed to limit particle contamination by using a stepper motor w/lead screw, “clean room grade” rails and bearings and a 1.25″ non-process exhaust port.
The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure). All aluminium parts are hard black anodized for corrosion resistance.

Options:

Extended Platform

RS232 Communications

Recessed mounting

Vespel package for high temperature applications

Stainless steel covers.

Hot boat sensor

Features

The Horizon Junior Series V will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.
As with all Mactronix wafer transfer systems, the Horizon Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
PLC controlled enhancing the transfer machine’s simplicity.
With the push of a button, the machine transfers wafers safely and automatically.
The Horizon Series V machines are designed to limit particle contamination by using a stepper motor w/lead screw, “clean room grade” rails and bearings and a 1.25″ non-process exhaust port.
The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
All aluminum parts are hard black anodized for corrosion resistance.
Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches.
Lift system uses ramped speed controls for gentle pick-up and landing.
Pressure sensors are used both for personal safety and to prevent wafer damage by inhibiting machine operation.
Retainers default to closed position to prevent the dropping of wafers in the event of a power disruption or a loss of air pressure or both.
A “Maintenance/Cleaning Mode” is provided to facilitate preventative maintenance.
The Series V machines have been tested with up to 50,000 volts of electrostatic discharge without disruption to internal electronics. The Series V machines are virtually immune to RFI noise, EMF, and ESD.

Specifications

Power	220/110VAC 50/60Hz Single Phase 3 Amp @ 110VAC
CDA/N2	75 to 90 psi
Grounding	Single Point Low Impedance VAC (provided)
Exhaust	1.25″ Diameter port; 5 CFM max (non-process)
Wafer size	3" (75mm) - 8" (200mm)
Weight	50 Lbs
Dimensions	75mm thru 150mm (3″ thru 6″): 8″ x 14″ x 32″ 200mm (8 inch): 10″ x 14.5″ x 32.5″ NOTE: Optional Extended Platform will add ≈ 6″ to the overall width of the machine.