Brooks 5850E Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Brooks 5850E Series Elastomer Sealed Thermal Mass Flow Controllers & Meters

Every product line has a workhorse — the 5850E and 5850i Series thermal mass flow controllers fit the bill. Actively in use for decades in thousands of applications worldwide, they utilize a unique, extremely stable flow sensor to provide the reliable, accurate and repeatable measurement and control that today’s demanding industrial manufacturing processes require.‚Äč

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  • Long-term zero stability of <0.2% full scale per year
  • Fast flow response to command changes with negligible overshoot/undershoot
  • Wide range of flow ratings - from 3 sccm up to 1000 slpm
  • High pressure rating - up to 1,500 psi
  • Removable flow sensor
  • Insensitive to mounting attitude
  • Mechanically and electrically compatible with other mass flow controllers
  • Electrically activated valve override
  • Corrosion-resistant valve



  • Proven long-term stability and accuracy across broad process and application range
  • Excellent return on investment due to reliable performance
  • Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
  • Easily installed and serviced due to analog only input/outputs



  • Chemical and petrochemical catalyst research and pilot processes
  • Laboratory and analytical systems
  • Life sciences bioreactors
  • Solar


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