- Long-term zero stability of <0.2% full scale per year
- Fast flow response to command changes with negligible overshoot/undershoot
- Wide range of flow ratings - from 3 sccm up to 1000 slpm
- High pressure rating - up to 1,500 psi
- Removable flow sensor
- Insensitive to mounting attitude
- Mechanically and electrically compatible with other mass flow controllers
- Electrically activated valve override
- Corrosion-resistant valve