The small 4kW evaporator with max. 4 cm³ crucible volume is equipped with a permanent magnet system for the primary deflection as well as an electromagnetic coil system for the two-dimensional, dynamic deflection of the electron beam.
The linear UHV multi hearth evaporator EBL6-UHV enables evaporation of up to 6 different materials without breaking vacuum. All utilities are installed on a horizontally mounted ISO160CF flange.
The small evaporator is available for pocket sizes 4, 7, and 15 cm³. With a rated power of 6 kW this unit can operate in a wide range of applications.
The large evaporator can be equipped with a maximum pocket volume of 100 cm³. With an operating power of up to 15 kW it is specialized for the use in metallization system or applications which require large capacity of the evaporate.