Single Reticle Pods
Offering products engineered to provide secure mask protection and a precise automation interface, increasing yields and minimising unscheduled downtime. The 150 mm single reticle pod is an advanced reticle-handling system that delivers superior performance during storage and transport.The SRP-150SD features:
- 150 mm reticle size, better than Class 1 internal environment
- Automation compatibility
- Top structure reduces opportunity for reticle damage due to accidental shock or drop
- Multiple ESD paths to ground
- Easy to clean and maintain
- Secure reticle retention allows transport as well as storage
- Reusable
- 150 mm SMIF interface
Find out more on the Entegris website here