Single Reticle Pods

Single Reticle Pods

Offering products engineered to provide secure mask protection and precise automation interface, increasing yields, and minimising unscheduled downtime. The 150 mm single reticle pod is an advanced reticle handling system providing superior performance during storage and transport.

The SRP-150SD features:

  • 150 mm reticle size better than class 1 internal environment
  • Automation compatibility
  • Top structure reduces opportunity for reticle damage due to accidental shock or drop
  • Multiple ESD paths to ground
  • Easy to clean and maintain
  • Secure reticle retention allows transport as well as storage
  • Reusable
  • 150 mm SMIF interface

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