Brooks GF80 Series Metal Sealed Thermal Mass Flow Controllers & Meters

For many industrial and semiconductor processes, both performance and cost efficiency are crucial. The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology as the best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point. Moving to a metal sealed MFC brings the full benefit of MultiFloT multi-gas/multi-range capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely.

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Features

Long-term zero stability of <±0.5% full scale per year
<1 second settling times
Full-scale flow rates up to 300 slpm
All-metal seal flow path - 16µ inch Ra surface finish
Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition
Programmable MultiFloTM capability—one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
Best-in-class temperature coefficient specification through active temperature compensation
Embedded self-test routines and independent diagnostic/service port
Slimline body with VCR fittings
DeviceNetTM, Profibus®, RS-485 and analog interfaces

Benefits

Fast <1 second flow settling time eliminates wasted gas and process variability
No elastomer seals that can have oxygen permeation, requiring replacement over time
MultiFloTM simplifies and streamlines changing process gases — no more removing and calibrating MFCs
New gases and/or ranges can be set in under 60 seconds
Measurement accuracy not affected by temperature variations
Convenient access to diagnostics port for maximum uptime
Compact size eases integration into tight machine spaces; excellent choice for retrofits
Multi-protocol communication interface simplifies integration into existing systems

Applications

Cost efficient retrofit/upgrade of legacy MFCs in refurbished semiconductor process tools
Reduce MFC inventory in six-inch/eight-inch semiconductor fabs
MOCVD for LED and power device manufacturing
Solar/thin film chemical vapor deposition (CVD) systems
Analytical OEM equipment

Downloads

Brooks GF80/81 Datasheet